Modelling of a shear-type piezoelectric actuator for AFM-based vibration-assisted nanomachining
نویسندگان
چکیده
Recent research investigations have reported the benefit of enhancing conventional AFM-based nanoscale machining operations by introduction high frequency vibrations between AFM tip and processed material. The technique relies on piezoelectric actuation is relatively straight forward to implement in practice. However, non-linearity actuators when operated under electric field conditions can affect dimensional accuracy fabricated nanostructures. To address these issues, paper reports a method based coupled mechanical-electrical Finite Element (FE) modelling predict relative motion an workpiece for vibration-assisted nanomachining applications. In particular, novelty proposed that it combines two classical approaches nonlinear behaviour materials. More specifically, sources are considered simultaneously combining field-dependant model from Muller Zhang with frequency-dependant Damjanovic. resulting combined employed establish constitutive equations implemented developed FE model. A further distinguishing characteristic work approach was subsequently validated comparing predicted widths grooves against those machined custom configuration.
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ژورنال
عنوان ژورنال: International Journal of Mechanical Sciences
سال: 2023
ISSN: ['1879-2162', '0020-7403']
DOI: https://doi.org/10.1016/j.ijmecsci.2022.108048